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Product Details:
Payment & Shipping Terms:
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| Product: | CVD Tube Lab Electric Furnace | Max. Temp: | 1200℃ |
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| Operation Temp.: | 1100℃ | Rated Power: | 5KW |
| Furnace Type: | Cover Can Be Opened | Insulation Material: | Alumina Ceramic Fiber Board |
| Chamber Size: | 80*400mm(OD*L) | Classification: | Laboratory Heating Equipments |
| Furnace Tube: | Quartz Tube | Certification: | CE |
| High Light: | 1200C vacuum tube furnace,CVD Electric Muffle Furnace,1200C Electric Muffle Furnace |
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Tube Lab Eelctric Furnace Features :
High film deposition rate: RF glow technology, greatly increasing the deposition rate of the film, the deposition rate can reach 10Å / S
High area uniformity: Advanced multi-point RF feeding technology, special gas path distribution and heating technology, etc., make the film uniformity index reach 8%
High consistency: using the advanced design concept of the semiconductor industry, the deviation between the substrates of one deposition is less than 2%
High process stability: Highly stable equipment ensures continuous and stable process
Main technical parameter of SUPER CVD Tube Lab Electric Furnace:
| Product name and model | SP-1200T-84 lab electric furnace |
| Heating tube size(OD×L) | Dia80x400mm |
| Chamber insulation materials | light weight aluminum oxide fiber ceramic |
| Maximum temperature | 1200°C working time ( < 3 hours) |
| Working temperature | 400-1100°C (adjustable, for long time ) |
| Temperature control | Intelligent 30 segments programmable and PID auto control |
| Heating rate | 1-15℃/min (adjustable) |
| Temperature accuracy | ±1℃ |
| Thermocouple | K type |
| Heating element | resistance wire |
| Ultimate vacuum | -0.1Mpa |
| Vacuum pump specifications model | 0.5A, pumping rate 0.5L/S, power 120W |
| Furnace shell | Double shell with fan cooling |
| Temperature display mode | Four Figure Liquid Crystal Display |
| Working power | AC 1-phase, 110V-240V, 50Hz/60Hz |
| Spare function | installed computer communication module and RS485 communication interface,to realize the remote control. |
SP-1200T CVD tube furnace standard model
| Model | Heating zone (OD×L mm) | Work power | Vacuum pump specifications |
| SP-1200T-53 | Φ50x300 mm(2.0"x12") |
AC 1-phase/3-phase 110V-400V 50Hz/60Hz. |
TW-0.5A;0.5L/S;120W;110V/220V |
| SP-1200T-54 | Φ50x400 mm(2.0"x16") | TW-0.5A;0.5L/S;120W;110V/220V | |
| SP-1200T-55 | Φ50x500 mm(2.0"x20") | TW-0.5A;0.5L/S;120W;110V/220V | |
| SP-1200T-63 | Φ60x300 mm(2.5"x12") | TW-0.5A;0.5L/S;120W;110V/220V | |
| SP-1200T-64 | Φ60x400 mm(2.5"x16") | TW-0.5A;0.5L/S;120W;110V/220V | |
| SP-1200T-65 | Φ60x500 mm(2.0"x20") | TW-0.5A;0.5L/S;120W;110V/220V | |
| SP-1200T-83 | Φ80x300 mm(3.2"x12") | TW-0.5A;0.5L/S;120W;110V/220V | |
| SP-1200T-84 | Φ80x400 mm(3.2"x16") | TW-0.5A;0.5L/S;120W;110V/220V | |
| SP-1200T-104 | Φ100x400 mm(4.0"x16") | TW-0.5A;0.5L/S;120W;110V/220V | |
| SP-1200T-154 | Φ150x400 mm(6.0"x16") | TW-1A;1L/S;120W;110V/220V |
Delivery times :
♥ For some normal standard size furnaces and components, we have in stock; So we can send out in 2-3 days;
♥ Other customized sizes the delivery time is from 15 days to 20 days according to different products request.
Our Warranty :
One year limited warranty with lifetime support, excluding heating element and ceramic tube damaged by user.
Attention: Any damages caused by the use of corrosive and acidic gases, and any damage from wrong operate and use are not under the coverage of One Year Limited Warranty.
Contact Person: Ms. Vera Zuo
Tel: 86-13607649242
